Lee, G. C.; Liang, Z.; Song, J. W.; Shen, J. D.; Liu, W. C.
Development of Measurement Capability for Micro-Vibration Evaluations with Application to Chip Fabrication Facilities.
National Science Foundation, Arlington, VA.; Erie County Industrial Development Agency, Buffalo, NY.,
December 1, 1999,
146 p.
Identifying Number(s): MCEER-99-0020
Keywords: ; Ground motion; Frequency measurement; Chips (Electronics); Earthquake resistant structures; Plant location; Integrated circuits; Vibration; Semiconductors; Soil structure interactions; Frequency response testing; Plant layout; Velocity; Seismicity; Root mean squares; Industrial plants